The air bearing rotary stage is directly driven by an integrated synchronous motor. The compact design is outstanding: with a free inner diameter of 350 mm the outer diameter is just 500 mm and its height is only 56 mm. The rotor has a vacuum supply, which is transmitted tubeless from the stator. The rotary drive is preferred for measurement applications by its very quiet running and the greaseless and oil-free air bearing. Its maximum speed is 500 rpm.