Vacuum blowers with canned drive series CM.
The new AERZEN blowers with canned drive are designed for the conveyance of air and neutral gases and are especially applied in the industrial high-vacuum technology. The blowers cover with a total of 14 sizes theoretical intake volume flows from 105 m³/h to 15.340 m³/h and pressure ranges up to 10-5 mbar abs.
Thanks to the worldwide largest canned motor- and hermetic series the customer can select from an extensive modular system the optimal blower-motor type for his application. Machines are available for the application concerning non-aggressive gases (PVD-applications) as well as concerning aggressive gases (CVD-applications) and with different motor variants for operation on lock chambers or process chambers. Furthermore, the AERZEN blowers distinguish themselves by a high mechanical load capacity (up to 250 mbar), based on which the pumping down times can be reduced considerably. Besides, the water cooling of the motor of the AERZEN blowers makes the application under clean room conditions possible. The blowers are (internally) type-tested and certified for the ATEX zone 0.