Highly integrated and autonomous sensors and electronics fabricated using semiconductor technologies conquer our modern society in all possible fields. Smaller footprints, integrated communications and power supply should work together with high precision MEMS and electronics. Smart miniaturized systems enable novel applications but demand at the same time new materials, coatings, and packaging concepts to address functionality, biocompatibility, reliability, and live time as well as cost issues. Fraunhofer ENAS is facing these challenges in certain fields. Using nanoimprint technologies novel surface properties due to nano patterns could be achieved. Ionic liquids enable electro chemical deposition of special metals like Ti, Pd, Al and others or even for functional coatings or active sensor structures. Room temperature parylene deposition is used for homogenous biocompatible thin film coatings, for moisture barriers or intermediate layers. Adpating well known screen and ink-jet printing processes together with 3D suitable aerosol-jet technologies nanoparticle based inks or pastes could be deposited on different substrates like flexible organics, polymers, PCB's, wafers, etc. Additionally the combination and process integration of these techniques with established micro system technologies will lead to better performances of micro and nano systems in future.