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HANNOVER MESSE 2019, 01 - 05 April
R&D-Project

Hollow Cathode

Logo AGC Glass Europe

Exhibitor

AGC Glass Europe

Exhibitor details
Exhibitor details
Development status
Soon market ready
Market introduction
03.2018
Degree of documentation
Well documented
Market orientation
Mass market

Product description

AGC Plasma Technology Solutions has successfully made the upscaling of a linearized Hollow Cathode for Plasma Enhanced Chemical Vapor Deposition (PE CVD) till a width of 3.6 meters. This allows the industrialization of this technology for large area coating on a wide variety of substrates. The integration of the hollow cathode in a standard magnetron sputtering line allows high rate deposition of SiO2 layers among other materials.

Hall 2, Stand A02

Plasma coating equipment design and manufacturing

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