HANNOVER MESSE 2018, 23 - 27 April
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Hotplates and Heating Chucks

Bach Resistor Ceramics

Exhibitor details
Logo Hotplates and Heating Chucks

Exhibition stand
Topic: Ceramic Pavilion - Assosiation of ceramic industry

Hall 5, Stand A18

Product description

Fully ceramic hotplates and heating chucks are made of silicon nitride with an integrated ceramic heating conductor. They are used in the semiconductor industry for the production and processing of silicon wafers. Superior mechanical strength and high temperature stability of silicon nitride enables an application at temperatures up to 1000°C under pressure stress or in high vacuum. Hotplates of silicon nitride can also be used in laboratory devices, in PVD and CVD processes and as radiation heater.

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