Advertisement
HANNOVER MESSE 2018, 23 - 27 April
Homepage>Exhibitors & Products >Laser Micromachining

Laser Micromachining

of silicon, glass, metal and polymer

Fraunhofer-Institut ENAS

Exhibitor details
Logo Laser Micromachining

Exhibition stand
Topic: IVAM Pavilion

Product description

In several applications in MEMS/NEMS manufacturing, processes for dicing, through holes, or cavity generation such as sawing, etching are either not economical, not applicable or just do not deliver the specified quality and resolution. Sawing for example exhibits no constant cut quality due to degradation of the saw blade, causes chipping, mechanical stress and cracks, is difficult to use for thin substrates, needs cooling fluids, which can destroy the function of non encapsulated devices and is only applicable for straight contours. The fabrication of micro parts or through holes using etching is a time consuming process and expensive in the development stage of a project due to the need of cost intensive masks but is favorable in manufacturing due to the batch type process. With ultrashort pulse laser micromachining it is possible to create any 2.5D structures in silicon with high quality, no heat affection of surrounding material and it is not limited to certain substrate shapes.

The precise processing of metals in the micrometer range plays an important role not only in MEMS/NEMS applications for example for sensors, actuators and mask fabrication. There is also the need for the fabrication of tools for molding, decorative elements and the marking of devices, to name a few. In a layered combination with other substrates, like in the case of sputtered metals on glass, semiconductors, polymers, etc. or laminated metal sheets, a precise, flexible and furthermore selective structuring method is desired.

All products offered by this exhibitor

Abscheidung von Parylene

Parylene ist ein Kunststoff, der sich im Bereich der Mikrosystemtechnik einsetzen lässt und der eine Vielzahl hervorragender Eigenschaften vereint wie optische Transparenz, nach ISO 10993 zertifizierte Biokompatibilität und Biostabilität, chemische Beständigkeit, elektrische Isolation, eine wasserabweisende ...read more

Galvanik aus ionischen Liquiden

Elektrochemische Abscheidung aus ionischen Flüssigkeitenread more

Belastungssensorik für Leitbau

Elektro-optische Wandler auf Basis von Quantum Dotsread more

Sens-o-Spheres - Wireless Charging

Project Description: Position independent measurement of process parameters Fully autarkical and minimally invasive micro measuring device Wireless data and power transfer Sphere diameter below 8 mm State-of-the-Art: Fixed sensor electrodes mounted into the bioreactor Only local measurements possible Wireless ...read more

High Precision Inclinationsensor

Features: - Single crystal silicon based - 2-axis inclination measurement (x and y) - Ultra low cross axis sensitivity due to HARMS technology - Over damped frequency response - Low noise - Excellent stability over temperature - Excellent reliability against overload - No sticking due to entire dry processing Application: - ...read more

Miniaturized NIR/MIR-Spectrometers

The micro mirror spectrometer described here, is realized in a simple optical set-up according to conventional scanning spectrometer. A scanning micro mirror, combined with a diffraction grating, is the essential element. It periodically disperses polychromatic radiation into its spectral components, ...read more

RFID antennas for packages

The reliable wireless identification of products in supply chains is a key technique in logistics. The aim of the reported project was to optimize the warehouse and transport logistics to save costs. In order of wireless identification Radio Frequency Identification (RFID) transponders are attached to ...read more

Miniaturized tunable IR bandpass filters

A Fabry-Perot-Interferometer (FPI) with quarter wavelength stacks supported by thick silicon carriers used as mirrors is the optical active part of this tunable infrared filter. A special arranged parallel spring suspension of the movable mirror fabricated by bulk micro machining leads to very flat and ...read more

Laser Micromachining

of silicon, glass, metal and polymerread more

Coating, encapsulation and packaging

Technologies fro smart integrated systemsread more

Wireless Data and Power Transmission

The technology offers an infrastructure solution for wireless power and data transmission for mobile devices. The system consists of a transceiver system (transmitter and receiver units). The transmitter unit is invisibly integrated within or below the surfaces and transmits both power and data via ...read more

Actuators for Active Flow Control

The Fraunhofer ENAS develops various fluidic actuators for the active flow control. Therefore performance requirements of the partners are considered on the one hand and new concepts are developed on the other hand to make the actuators more compact, efficient and capable of being integrated. During ...read more

RFID antennas for packages

The reliable wireless identification of products in supply chains is a key technique in logistics. The aim of the reported project was to optimize the warehouse and transport logistics to save costs. In order of wireless identification Radio Frequency Identification (RFID) transponders are attached to ...read more

Coating, encapsulation and packaging

Technologies fro smart integrated systemsread more

Wireless Data and Power Transmission

The technology offers an infrastructure solution for wireless power and data transmission for mobile devices. The system consists of a transceiver system (transmitter and receiver units). The transmitter unit is invisibly integrated within or below the surfaces and transmits both power and data via ...read more

High Precision Inclinationsensor

Features: - Single crystal silicon based - 2-axis inclination measurement (x and y) - Ultra low cross axis sensitivity due to HARMS technology - Over damped frequency response - Low noise - Excellent stability over temperature - Excellent reliability against overload - No sticking due to entire dry processing Application: - ...read more

Actuators for Active Flow Control

The Fraunhofer ENAS develops various fluidic actuators for the active flow control. Therefore performance requirements of the partners are considered on the one hand and new concepts are developed on the other hand to make the actuators more compact, efficient and capable of being integrated. During ...read more

Grease Sensor

Greases are used at the contact surfaces of bearings to avoid premature wear and fatigue of the bearing. To Rolling prevent failures that can result from lack of lubricant, lubricant contamination or aging of lubricant, the grease sensor including evaluation system, has developed together with the ...read more

Miniaturized tunable IR bandpass filters

A Fabry-Perot-Interferometer (FPI) with quarter wavelength stacks supported by thick silicon carriers used as mirrors is the optical active part of this tunable infrared filter. A special arranged parallel spring suspension of the movable mirror fabricated by bulk micro machining leads to very flat and ...read more

Miniaturized NIR/MIR-Spectrometers

The micro mirror spectrometer described here, is realized in a simple optical set-up according to conventional scanning spectrometer. A scanning micro mirror, combined with a diffraction grating, is the essential element. It periodically disperses polychromatic radiation into its spectral components, ...read more

Stored items

0

Server communication error: Item could not be saved.