In addition to fast non-destructive element distribution analysis of large sample areas the M4 TORNADO Micro-XRF spectrometer provides analysis of the composition and thickness of thin metallic multilayers. The instrument's geometry is ideally suited for layer thickness determination. An unlimited number of layers and elements can be analyzed, only depending on the physical properties of the layers and elements present. For light elements analysis is performed in vacuum. The M4 TORNADO software supplies powerful data acquisition and evaluation. The system also includes the XData software, a versatile method editor for layer thickness determination and method development. Analysis is performed in accordance with ASTM B568 and DIN/ISO 3497. Application fields are the automotive and electronics industry, microelectronics, PCB (printed circuit boards) and GMF (general metal finishing).