Automatic series production of components or semi-finished products of reproducible quality is a prerequisite for economic and cost-efficient fabrication.This especially applies to the microrange, where any additional effort caused by lacking quality is highly cost-intensive. Scientists of the Institute of Microstructure Technology (IMT) have developed a hot embossing method and tool for the automatic series structurization by plastic deformation of components with a high fabrication accuracy to save both expenditure and costs.Conventional hot embossing processes need a long time for both heating and cooling of the tool, which delays the complete production process of the component and negatively affects series production. By a special design of the tool with a temperature transfer element, the IMT scientists succeeded in reducing process times. As a result, thermal inertia of the tool is reduced significantly. The temperature transfer element has to be adapted individually to the tool, e.g. a hot-rolling device or another hot embossing tool. Hot and cold areas are arranged separately on the element and connected thermally to the embossing tool in a selective manner depending on the process cycle. This allows for an isolated heating or cooling of the tool via separate switch points. The figure presents a concept with two vertical axes and a separate rotary disk for the cyclic molding of tools in wafer formats. Material displacement is adjusted by clearances.