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MEMS Capacitive Pressure Sensors

ESCP-BMS1 Board Mountable MEMS Capacitive Pressure Sensors




Exhibitor details
Exhibitor details
Logo MEMS Capacitive Pressure Sensors

Product description

ES Systems has developed a series of board mountable pressure sensors targeting a variety of markets requiring high resolution and accuracy for absolute, gauge or differential pressure measurements. The ESCP-BMS1 Series is a MEMS-based silicon capacitive pressure sensor with state-of-the-art performance.

ESCP-BMS1 Series is an absolute, gauge or differential pressure sensor of ultra-high resolution with analog, PWM, SPI or I2C interface. The output is fully calibrated, and temperature compensated based on the internal temperature sensor and the factory calibration coefficients which are stored in the embedded memory. The sensor is ready to be installed directly to the end system without further processing. The total error including repeatability, hysteresis, non-linearity, thermal offset and calibration error between 0oC and 60oC is better than 0.25% FS.

Different power modes are available enabling low power operation, while the output rate and thus the conversion speed is programmable allowing the end user to customize/optimize performance. The sensor can be configured to provide both high accuracy 32-bit pressure and temperature outputs.

ESCP-BMS1 Series is a silicon capacitive pressure sensor with excellent long-term stability. The sensor is incorporated in a standard 8-pin DIP package with a single or two pneumatic ports. The top port is the high side and the bottom port is the low side.


Pressure Type: Absolure, Gauge, Differential
Pressure Range, Absolute: 50mbara … 10bara
Pressure Range, Gauge: 0barg … 11barg
Pressure Range, Differential: ±10mbar … ±1bar
Power Supply: 3,3V
Current Consumption, full operation : Accuracy: 0.1% FS
Operating Temperature: -40C … +125C
Compensation Temperature: 0C … +60C, -20C … +85C, -40C … +125C
Digital Output: Calibrated Pressure & Temperature
Analog Output: Calibrated Pressure
Output: I2C, SPI, PWM, Analog
Overpressure tolerance: Up to 100x
Media Compatibility: Gases, Liquids

Hall 11, Stand F41

AMA Center for Sensor, Measuring and Testing Technologies - Meeting Point Sensorics

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