Phase fluid toolbox for microelectronics processing
One of the outstanding future topics of technological development is the advancing digi¬talization that takes over more and more importance for industrial production and leads to networked and more efficient production processes, often called industry 4.0. Basic elements for the technical implementation are component parts of the micro-electronics fabrication. An important method in manufacturing of micro-electronic parts and microsystems technology is structuring using photoresist coating. So far during micro-electronics production the remaining residues are removed by aggressive chemicals that are of high environmental concern. These cleaning processes are thus critical with respect to handling, waste manage-ment, and the environment.
The technological goal of this project, which is pursued with the project partner intelligent fluids GmbH in Leuna and Leipzig, is the innovative and universal removal of process residues in mikro-electronics produk-tion with dynamical, environmentally safe, intelligent cleaning fluids that decay to harmless chemicals. The group „Instrumental and polymer analysis“ of the university of Applied Sciences Merseburg focuses on the characterization of interaction mechanisms between the coating to be removed and the surfactant systems with methods of analytical and physical chemistry. Based on the elaborated interaction models a chemische toolbox is going to be established, so that for each substrate the optimal intelligent fluid can be build up.
- Cleaning agents, degreasants
- Other operating materials, auxiliary equipment for cleaning and pre-treatment of surfaces
- Floor flatness improvement, floor repair, floor coating, floor cleaning
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