The CiS Research Institute has developed a tiny microchip for determining the direction of light incidence, thus making a contribution to climate protection. The small size and simple integrability as well as the MEMS manufacturing technology suitable for mass production characterize this component. The monolithic sensor is based on four integrated photodiodes in a 3D-structured silicon substrate.
Sensors for detecting the angle of incidence of light are known, for example, from tracking systems of photovoltaic systems. They are used to increase energy efficiency. The new RISEQ sensor technology of the CiS Research Institute enables the development and fabrication of monolithically integrated direction-sensitive sensors. The basic concept is based on the integration of four photodiodes in the walls of a cavity in silicon. Depending on the design, the size of the sensor chip can be less than 1 mm³. The monolithic design of the sensor proves to be insensitive to vibrations. The RISEQ sensor technology enables low manufacturing costs and minimal component dispersion as well as high reproducibility accuracy of angle determination.
An initial application scenario is being tested in an ongoing collaborative project. The ultra-flat sensor module with the 4-quadrant photodiode is integrated in a window pane for this purpose and precisely detects the irradiation direction of daylight for controlling facade-integrated shading systems. Other applications are possible for beam steering in laser technology, the control of smart displays or automotive safety.
The described research and development work was funded in the research project "Direction sensitive quadrant detector (RISEQ), FKZ: MF130154, as well as in the research project "LightControl" FKZ: (ZF4001704GM9, ZIM) by the German Federal Ministry of Economics and Climate Protection (BMWK).
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