A novel highly sensitive palladium-based hydrogen sensor is being developed with two industrial partners in the BMBF project "H2MEMS".
The CiS Research Institute, a proven specialist in the development of silicon-based pressure sensors, is developing and testing palladium-coated MEMS structures similar to Si MEMS pressure sensors in the project with its partners. Palladium has the highest absorptivity of all elements for hydrogen. At room temperature, it can bind 900 times its own volume. This leads to an increase in volume, which is to be used for a basic sensory element (MEMS device). If a palladium layer is applied to a passive material (membrane) of the basic element, considerable mechanical stresses are created due to the volume increases. The magnitude of the mechanical stresses is a measure of the hydrogen content in the palladium. By means of a highly sensitive piezoresistive measuring bridge, these mechanical stresses can be evaluated metrologically. The signal is a measure of the hydrogen content in the sample gas. With the new sensor, H2 concentrations in the ppm range and up to 100 vol% can be measured without any doubt.
In a first step, different basic structures are selected at the CiS Research Institute and coated with palladium by a project partner. Extensive FEM simulations refine the material selection for the sensor. Classical semiconductor technologies for manufacturing are adapted to the specific requirements by the CiS Research Institute and technological platforms are developed. Important parameters are a large measuring range, the avoidance of cross-sensitivities, a high long-term stability as well as a fast response.
The project on which this report is based was funded by the German Federal Ministry of Education and Research under funding code 03ZZ0757B.
To Product Page
Hotline:
+49 (0)511 89-0
Deutsche Messe AG
Cookie Settings