Infrared light is a carrier of numerous information. The thermal emission of surfaces is used for contact-free temperature measurement. Material-specific spectral light absorption is used to determine the composition and concentration of various substances and mixtures.
The CiS Research Institute has focused on the development and fabrication of IR emitters and thermopile sensors whose active zone is spanned within a very thin membrane. The silicon carrier is completely removed towards the end of the fabrication processes in these areas. A narrow frame remains for handling and assembly. This structure offers the advantage that the active regions have a very low thermal mass and are well thermally isolated from the rest of the system. Assemblies created this way are very small with edge lengths of 1 - 3 mm and exhibit fast response times. These MEMS IR emitters are based on broadband thermal emission from a typical 600 - 800°C ohmic heater. Spectral response and dynamics are also application-specifically controlled by the layer structure and geometry. In non-dispersive IR (NDIR) sensing, this light passes through the volume under investigation. An IR sensor, often divided into several spectral channels, is placed on the opposite side to determine the concentration of the sought substances. Thermopiles with optical filters are often used for this purpose, whereby the temperature difference between the illuminated membrane and the colder sensor frame leads to measurable thermoelectric voltages. This technology is often used for gas sensors.
The versatile technology platform enables individual developments of gas sensors and temperature measurement devices for industrial partners. The silicon microsensor technologies are flanked by innovative solutions for their assembly and housing for compact, miniaturized and specialized assemblies.
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