Around 3,000 to 8,000 semiconductor components are installed in today's electric cars for motor control, battery management, and assistance systems—and this number is rising significantly. But whether it's mobility, communication, health, safety, entertainment, energy supply, or environmental protection, semiconductors form the basis for innovation and progress in almost all areas of life. As a result, the semiconductor industry plays a prominent role in our society. However, the industry faces the same challenges as other sectors: increasing demands on quality, efficiency, and productivity, coupled with growing cost pressure. To meet these challenges, automation plays a key role in semiconductor manufacturing, just as it does in other areas.

Precise control and seamless monitoring

However, manufacturing in this industry differs significantly from the rest of the industry in two respects: One is the precision required in manufacturing. Modern processors often contain several billion transistors. This requires structures with distances in the single-digit nanometer range to be applied to the wafers. This leads directly to the second point: an unprecedented number of different production steps are required for such precision work. Dozens of processes must be seamlessly integrated, most of them in clean room environments. "As different as the steps are, from wafer production and lithography to testing and packaging, all require precise control and seamless monitoring,“ says Marcel Ellwart, Industry Management Semiconductor Industry at Beckhoff. ”In addition, the production facilities must be able to react flexibly to changing product variants while ensuring high throughput rates with maximum quality. This makes the use of modern automation technology indispensable."

EtherCAT – the standard for the semiconductor industry

With its broad and flexible portfolio, Beckhoff as an automation specialist can precisely cover the multifaceted processes and applications in the semiconductor industry. Communication plays a special role here: “With EtherCAT, Beckhoff has developed a fieldbus standard that has long been established as the leading communication protocol in semiconductor manufacturing,” emphasizes Marcel Ellwart. The majority of large equipment manufacturers now rely on EtherCAT. Its consistent real-time capability, high flexibility, and scalability were decisive factors in its success. “Thanks to its open architecture and broad acceptance among manufacturers, EtherCAT enables the uncomplicated integration of components and systems, from sensors and actuators to complex controllers,” says the industry manager.

From wafer production to processing and packaging

With PC-based control, Beckhoff provides the semiconductor industry with a control concept tailored to its needs. It covers all automation tasks: from wafer production to processing and packaging of the chips. The Beckhoff approach not only includes the PLC, but also HMI connection, motion control, measurement technology, and vision. The TwinCAT 3 software platform transforms industrial PCs into efficient real-time control systems for all engineering and runtime processes. In line with the many different requirements of the semiconductor industry, the automation software has a modular structure and can be expanded with numerous functions.

Special industry – special added value

With its portfolio, Beckhoff aims to provide a powerful response to the challenges mentioned above in the semiconductor industry. This includes several innovations from the Verler-based company that are expected to be particularly beneficial to the industry.

Compact EtherCAT plug-in modules

The compact EtherCAT plug-in modules of the EJ series replace elaborately developed I/O boards in series production systems. They are plugged directly onto a signal distribution board and distribute signals or voltage to application-specific connectors. This saves time, money, and space. It also eliminates the risk of faulty wiring. Like classic EtherCAT terminals, the EJ modules offer a wide variety of signals as well as fully integrated safety and motion.

I/O-integrated control

To reduce the complexity of systems, the drive control of servo and stepper motors is integrated directly into the I/Os. In the 48 V DC segment, EtherCAT plug-in modules, servo motor terminals, or box modules in combination with the AM8100 motor series enable extremely compact servo axes with high dynamics and precision. I/O-integrated control can also be implemented for the operation of adjustment axes or for drives with servo amplifiers directly on the machine.

High-end measurement technology modules

The Beckhoff portfolio also meets the requirements of the semiconductor industry in terms of measurement technology: from the second cycle to the kilohertz range, from the measurement of voltage and current to vibrations and force measurement. The high-end measurement technology modules of the ELM series are seamlessly integrated into the EtherCAT I/O system and also reliably capture process-critical measurement channels. TwinCAT provides powerful features for evaluating the generated data.

Real-time image processing

Beckhoff Vision integrates real-time image processing for wafer production into new and existing control environments. There is no need to separate vision and automation technology. At the same time, the vision components offer a robust design, high scalability, and long-term availability—from cameras to optics and lighting to the TwinCAT Vision software.

Dynamic planar motor drive system

XPlanar is set to revolutionize handling in the semiconductor industry. This is because the planar motor drive system transports workpieces dynamically, with maximum precision and high freedom of movement – both within a system and from machine to machine. The movers float contactlessly and independently of each other along individually specified routes. Products can overtake each other, be ejected or temporarily buffered without affecting the production flow.

Open-system workflow without lock-in effect

Modern AI solutions also offer enormous potential for semiconductor manufacturing. Beckhoff has integrated machine learning into the TwinCAT 3 control software, providing a modular hardware and software kit for integrating AI models directly into the PLC. Users benefit from an open system workflow without lock-in effect, from data acquisition and model training to the execution of learned models. Applications for which Beckhoff already offers AI include anomaly detection for predictive maintenance, image classification in quality assurance, and time series analysis for improving production processes.

Semiconductor success stories from Beckhoff

With its extensive portfolio and in-depth industry expertise, Beckhoff has automated an impressive number of applications across the entire value chain in semiconductor production in recent years. The following examples, which have already been reported on in detail in Beckhoff's customer magazine PC-Control, illustrate the versatility of these solutions.

Crystal production

Jingsheng Mechanical & Electrical (JSG) relies on a Beckhoff solution consisting of Embedded PCs, TwinCAT 3, and EtherCAT I/O terminals for the automation of its single-crystal furnaces. It replaces previous PLC and temperature control systems. In doing so, it offers significantly more flexibility, scalability, and integration options. At the heart of the process control system is precise temperature control, which is essential for single-crystal growth as it ensures quality through consistent temperature control over long periods of time.

High-purity gases

Applied Energy Systems (AES) has developed a new controller for the supply of ultra-high-purity gases to meet Industry 4.0 requirements in semiconductor manufacturing. In addition to a compact CP6606 Panel PC from Beckhoff, the company relies on the modular plug-in I/O modules of the EJ series. The ultra-compact system retains the previous housing size, but offers extended functions, OPC UA and cloud interfaces, flexible customization options, and a 50 percent reduction in installation time.

Chip handling

Mühlbauer also relies on EJ plug-in modules in its high-precision die sorting machines for semiconductor finishing. This enables the processing of 30,000 microchips per hour with improved wafer handling and reduced wiring effort. Four specially developed signal distribution boards with a total of 26 EtherCAT plug-in modules integrate digital and analog I/Os, incremental encoders, stepper motor modules, supply logic, and servo amplifiers for ceramic and piezo motors.

New materials

Gallium oxide offers great potential for the production of new semiconductor materials. However, development on existing equipment has been limited by restricted flexibility, reliability, and high costs. Agnitron has created a flexible, multi-purpose solution based on PC-based control that can be converted within a few days. EtherCAT ensures compact, space-saving networking of the numerous thermocouples and I/Os while also facilitating the integration of existing field devices.

Advanced Packaging

As miniaturization increasingly pushes conventional lithography-based processes to their limits, the start-up Fonontech is taking a new approach. Impulse Printing Technology uses silicon printing plates with etched micrometer structures and integrated heating structures. The goal is a resolution of five micrometers with minimal overlap error. The control system used enables real-time synchronization and positioning via PC-based control, EtherCAT, and XFC (eXtreme Fast Control) technology.

AI and edge: the dawn of a new era

These application examples underscore that semiconductor manufacturing is at the dawn of a new era. “Automation solutions from Beckhoff offer the best conditions for meeting new challenges and implementing intelligent manufacturing processes,” summarizes Marcel Ellwart. The combination of PC-based control, powerful data processing and real-time EtherCAT communication allows the integration of AI algorithms for process optimization. Edge solutions enable decentralized data analysis directly at the machine, which shortens response times and increases plant availability. Such approaches pave the way for even more efficient, flexible and sustainable semiconductor production in the future.

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